Product-Code |
CPO-L00500 |
CPS-D00500 |
Unit |
|
|
|
|
Position-Sensor |
– |
SGS, Full-Bridge |
|
Range, Open Loop (-45..180 V) |
600 |
600 |
µm |
Range, Closed Loop |
– |
500 |
µm |
Resolution, open loop |
3 |
3 |
nm |
Resolution, closed loop |
– |
5 |
nm |
Linearity, closed loop |
– |
0.2 |
% |
Repeatability |
– |
50 |
nm |
Push/Pull, maximum |
40/20 |
N |
Lateral Force, maximum |
10 |
N |
Stiffness |
0.15 |
N/µm |
Resonance, unloaded |
260 |
Hz |
Resonance, with 100 g load |
180 |
Hz |
Electrical Capacitance @ 1V eff, 1kHz |
4.4 |
µF |
Body-Material |
aluminum/stainless-steel |
|
Connector |
Lemo |
DSub15 |
|
Operating Temperature |
-20..+80 |
°C |
|
|