| Product-Code |
SFS-D01000 |
Unit |
| |
|
|
| Position-Sensor |
SGS, Full-Bridge |
|
| Range, Closed Loop |
1000 |
µm |
| Range, Open Loop (-35.. 150 V) |
1100 |
µm |
| Resolution, open loop |
5 |
nm |
| Resolution, closed loop |
10 |
nm |
| Linearity, closed loop |
0.2 |
% |
| Repeatability |
100 |
nm |
| Push/Pull |
20/10 |
N |
| Load |
300 |
g |
| Stiffness |
0.1 |
N/µm |
| Resonance |
135 |
Hz |
| Resonance, w/ 250 g load |
80 |
Hz |
| Electrical Cap. @ 1V eff, 1kHz |
17.8 |
µF |
| Body-Material |
aluminum/stainless-steel |
|
| Operating Temperature |
-20..80 |
°C |
|
|